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Defect and Impurity Engineered Semiconductors and Devices: Volume 378
Hardback
Main Details
Title |
Defect and Impurity Engineered Semiconductors and Devices: Volume 378
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Authors and Contributors |
Edited by I. Akasaki
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Edited by S. Ashok
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Edited by J. Chevallier
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Edited by N. M. Johnson
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Edited by B. L. Sopori
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Series | MRS Proceedings |
Physical Properties |
Format:Hardback | Pages:1082 | Dimensions(mm): Height 237,Width 160 |
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Category/Genre | Materials science |
ISBN/Barcode |
9781558992818
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Classifications | Dewey:621.38152 |
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Audience | Professional & Vocational | |
Illustrations |
Worked examples or Exercises
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Publishing Details |
Publisher |
Materials Research Society
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Imprint |
Materials Research Society
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Publication Date |
16 October 1995 |
Publication Country |
United States
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Description
Defect engineering has come of age. That theme is well documented by both the academic and industrial research communities in this book from MRS. Going beyond defect control, the book explores the engineering of desired properties in semiconductor materials and devices through the deliberate introduction and manipulation of defects and impurities. Papers are grouped around ten distinct topics covering materials, processing and devices. Topics include: grown-in defects in bulk crystals; grown-in defects in thin films; gettering and related phenomena; hydrogen interaction with semiconductors; defect issues in widegap semiconductors; defect characterization; ion implantation and process-induced defects; defects in devices; interfaces, quantum wells and superlattices; and defect properties, reaction, activation and passivation.
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