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Doping Engineering for Front-End Processing: Volume 1070
Paperback / softback
Main Details
| Title |
Doping Engineering for Front-End Processing: Volume 1070
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| Authors and Contributors |
Edited by B. J. Pawlak
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Edited by M. L. Pelaz
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Edited by M. Law
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Edited by K. Surugo
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| Series | MRS Proceedings |
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| Physical Properties |
| Format:Paperback / softback | | Pages:336 | | Dimensions(mm): Height 229,Width 152 |
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| Category/Genre | Materials science |
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| ISBN/Barcode |
9781107408548
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| Classifications | Dewey:620.112972 |
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| Audience | | Postgraduate, Research & Scholarly | | Professional & Vocational | |
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Publishing Details |
| Publisher |
Cambridge University Press
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| Imprint |
Cambridge University Press
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| Publication Date |
5 June 2014 |
| Publication Country |
United Kingdom
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Description
Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.
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