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Advanced Metallization Conference 2008 (AMC 2008): Volume 24
Hardback
Main Details
| Title |
Advanced Metallization Conference 2008 (AMC 2008): Volume 24
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| Authors and Contributors |
Edited by Mehul Naik
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Edited by Roey Shaviv
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Edited by Takashi Yoda
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Edited by Kazuyoshi Ueno
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| Series | MRS Conference Proceedings |
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| Physical Properties |
| Format:Hardback | | Pages:769 | | Dimensions(mm): Height 235,Width 158 |
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| Category/Genre | Materials science |
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| ISBN/Barcode |
9781605111254
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| Audience | | Professional & Vocational | |
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Publishing Details |
| Publisher |
Materials Research Society
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| Imprint |
Materials Research Society
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| Publication Date |
1 January 2009 |
| Publication Country |
United States
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Description
The Advanced Metallization Conference - held in San Diego, California, and Tokyo, Japan - marked its 25th anniversary in 2008. These two sister conferences form a unique 'one conference at two sites' that focuses on the latest R&D and manufacturing results, as well as real-world integration and reliability data on the application of metallization and related technologies for advanced IC devices. Scientists and engineers from around the world came to listen and present state-of-the-art work in the field of ULSI interconnect technology including metallization, dielectrics, integration, packaging, design and vertical integration. A keynote address by Gary Patton, vice president, IBM Systems and Technology Group, on 'Leading-edge Silicon Technology through Innovation and Collaboration', is featured. Additional topics include: integration; metallization; materials and characterization; CMP and cleaning; 3D integration and packaging; low-k materials; and reliability and yield.
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