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Doping Engineering for Front-End Processing: Volume 1070
Hardback
Main Details
| Title |
Doping Engineering for Front-End Processing: Volume 1070
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| Authors and Contributors |
Edited by B. J. Pawlak
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Edited by M. L. Pelaz
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Edited by M. Law
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Edited by K. Surugo
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| Series | MRS Proceedings |
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| Physical Properties |
| Format:Hardback | | Pages:319 | | Dimensions(mm): Height 235,Width 160 |
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| Category/Genre | Materials science |
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| ISBN/Barcode |
9781605110400
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| Classifications | Dewey:621.38152 |
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| Audience | | Professional & Vocational | |
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Publishing Details |
| Publisher |
Materials Research Society
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| Imprint |
Materials Research Society
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| Publication Date |
17 October 2008 |
| Publication Country |
United States
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Description
Materials scientists, silicon technologists and TCAD researchers come together in this book to share experimental results and physical models, discuss achievements and challenges, and identify key issues for future research in this field. The volume focuses on many aspects related to doping of semiconductors (Si, SiGe and Ge) for device fabrication, and explores areas for single-gate as well as multi-gate devices with planar and vertical architectures. Surface properties, coverage, bonding saturation and passivation, and annealing ambient are also discussed.
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