| Title |
Tungsten and Other Refractory Metals for VLSI Applications III: Volume 3
|
| Authors and Contributors |
Edited by Victor A. Wells
|
| Series | MRS Conference Proceedings |
|---|
| Physical Properties |
| Format:Hardback | | Dimensions(mm): Height 235,Width 158 |
|
| Category/Genre | Materials science |
|---|
| ISBN/Barcode |
9780931837845
|
| Audience | | Professional & Vocational | |
|---|
| Illustrations |
Worked examples or Exercises
|
|
Publishing Details |
| Publisher |
Materials Research Society
|
| Imprint |
Materials Research Society
|
| Publication Date |
1 April 1988 |
| Publication Country |
United States
|
