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Tungsten and Other Refractory Metals for VLSI Applications III: Volume 3

Hardback

Main Details

Title Tungsten and Other Refractory Metals for VLSI Applications III: Volume 3
Authors and Contributors      Edited by Victor A. Wells
SeriesMRS Conference Proceedings
Physical Properties
Format:Hardback
Dimensions(mm): Height 235,Width 158
Category/GenreMaterials science
ISBN/Barcode 9780931837845
Audience
Professional & Vocational
Illustrations Worked examples or Exercises

Publishing Details

Publisher Materials Research Society
Imprint Materials Research Society
Publication Date 1 April 1988
Publication Country United States

Description

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.